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说明
无说明配置
• thin-film deposition • encapsulation • coating • e.g. SiO2, SiNx, SiONx, a-Si • up to 200 mm wafers • glovebox for high purity sample loadingOEM 型号描述
未提供文件
无文件
SENTECH
SI 500 D
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
117179
晶圆尺寸：
8"/200mm
年份：
未知
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说明
无说明配置
• thin-film deposition • encapsulation • coating • e.g. SiO2, SiNx, SiONx, a-Si • up to 200 mm wafers • glovebox for high purity sample loadingOEM 型号描述
未提供文件
无文件