说明
Dielectric Etch配置
<p>Tool is operating in clean room.</p><p>Shipping brackets and kits will need to be supplied by buyer.</p><p> </p><p>Pictures: Please see.</p><p>CONFIGURATION will be provided.</p><p>Missing or damaged parts: Not reported. Please inspect to confirm.</p>OEM 型号描述
Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.文件
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TEL / TOKYO ELECTRON
TELIUS SP 305 SCCM
已验证
类别
Plasma Etch
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
20580
晶圆尺寸：
12"/300mm
年份：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
TELIUS SP 305 SCCM
类别
Plasma Etch
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
20580
晶圆尺寸：
12"/300mm
年份：
2006
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Dielectric Etch配置
<p>Tool is operating in clean room.</p><p>Shipping brackets and kits will need to be supplied by buyer.</p><p> </p><p>Pictures: Please see.</p><p>CONFIGURATION will be provided.</p><p>Missing or damaged parts: Not reported. Please inspect to confirm.</p>OEM 型号描述
Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.文件
无文件