说明
Comdel CX-2500/6.78 MHz 2500 W RF Generator, PN: FP3368R1 Description: The CX-2500 power supply has a power range of 2500 Watts with a fixed frequency of 6.78 MHz. The solid-state design provides low cost of ownership with high reliability. Applications: The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.配置
The Unit's Serial Number Tag Reads: Model Number: CX-2500/6.78 Serial Number: 091 Part Number: FP3368R1 Date of Manufacturing: 10/29/99 Specifications: Power Output: 2500 W Harmonic Distortion: Less than -30 dBc Power Requirements: 190-225 VAC; Three Phase; 50/60 Hz / 15 A typical Control I/O Connector: 25-pin subiminiature D type Std. Output Connector: Type-N Power Control: 0-10 VDC input for 0 to maximum-rated output Power Control Linearity: ≤ 2% of setting at power levels above 10% of rated power Frequency: Fixed Frequency of 6.78 MHz Dimensions: 7" H x 19" W x 21.5" D (17.8 cm x 48.3 cm x 54.6 cm) Weight: 132 lbs. (60 kg) Cooling: Water: 1.5 GPM (5.7 liters) Certification: ETL Marked, Semi F47OEM 型号描述
RF Generator文件
无文件
COMDEL
CX-2500
类别
Power Supplies
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Uncrated
产品编号：
126886
晶圆尺寸：
未知
年份：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Comdel CX-2500/6.78 MHz 2500 W RF Generator, PN: FP3368R1 Description: The CX-2500 power supply has a power range of 2500 Watts with a fixed frequency of 6.78 MHz. The solid-state design provides low cost of ownership with high reliability. Applications: The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.配置
The Unit's Serial Number Tag Reads: Model Number: CX-2500/6.78 Serial Number: 091 Part Number: FP3368R1 Date of Manufacturing: 10/29/99 Specifications: Power Output: 2500 W Harmonic Distortion: Less than -30 dBc Power Requirements: 190-225 VAC; Three Phase; 50/60 Hz / 15 A typical Control I/O Connector: 25-pin subiminiature D type Std. Output Connector: Type-N Power Control: 0-10 VDC input for 0 to maximum-rated output Power Control Linearity: ≤ 2% of setting at power levels above 10% of rated power Frequency: Fixed Frequency of 6.78 MHz Dimensions: 7" H x 19" W x 21.5" D (17.8 cm x 48.3 cm x 54.6 cm) Weight: 132 lbs. (60 kg) Cooling: Water: 1.5 GPM (5.7 liters) Certification: ETL Marked, Semi F47OEM 型号描述
RF Generator文件
无文件