概述

KLA-Tencor HRP 340 is among the most production worthy metrology solutions in 300mm segment, supporting the most advanced applications including: etch, CMP, and C4 bump monitoring, and more. The 340 series configurations are designed to meet cost, performance, and automation requirements and can be configured as a single open cassette, or dual FIMS for stringent particle requirements. The system utilizes KLA-Tencor's proprietary UltraLite sensor technology for maintaining constant tip-sample forces and vertical linearity over the full Z range. The HRP 340 features a configurable piezo flexure sensor stage for high resolution scans.