概述

In 1994, the Tencor P-20 was introduced as the industry’s first fully automated stylus profiler. This tool was designed to automate the entire process of profiling, from placing the wafer cassette on the tool to obtaining final measurement results. To achieve full automation, the P-20 incorporated pattern recognition and SECS/GEM technology in combination with its existing handler. This allowed for a more efficient and streamlined profiling process.