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说明
Pumping Speed: 106/127 cfm Ultimate Pressure: 50Hz/60Hz –0.0040 Torr 6 Pump Stages Motor Rating: 50Hz / 60Hz – 2880/3,460 RPM Electrical Requirements: 50Hz – 200 VAC 60Hz – 200-220 VAC, 3 Phase, 40 Amp Cooling Water Requirements: 1.3 - 2.1 GPM at 60 PSI, Max. Temp. 30C Dimensions 36.9” x 17.7” x 41.5” weight 752 lbs配置
无配置OEM 型号描述
未提供文件
无文件
EBARA
50 X 20
类别
Pumps / Compressor
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
21968
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Pumping Speed: 106/127 cfm Ultimate Pressure: 50Hz/60Hz –0.0040 Torr 6 Pump Stages Motor Rating: 50Hz / 60Hz – 2880/3,460 RPM Electrical Requirements: 50Hz – 200 VAC 60Hz – 200-220 VAC, 3 Phase, 40 Amp Cooling Water Requirements: 1.3 - 2.1 GPM at 60 PSI, Max. Temp. 30C Dimensions 36.9” x 17.7” x 41.5” weight 752 lbs配置
无配置OEM 型号描述
未提供文件
无文件