
说明
DRY PUMP配置
无配置OEM 型号描述
Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime. Pumping Speed (60 Hz): 4,000~8,500 l/min文件
无文件
EBARA
ESR80W
类别
Pumps / Compressor
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
132773
晶圆尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
DRY PUMP配置
无配置OEM 型号描述
Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime. Pumping Speed (60 Hz): 4,000~8,500 l/min文件
无文件