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CVD, Furnace, Etch, RTPOEM 型号描述
"The QDP80 DRYSTAR Dry pump is available as a stand alone unit or in combination with a QMB500hydrokinetic drive mechanical booster, for applications where more pumping speed and/or lower vacuum levels are required - no pressure switches required. The scope of supply includes as standard an in-line pressure regulator and gauge for facilitating the shaft seal purge, a cleanable stainless steel exhaust silencer, and exhaust check valve. The QDP80 Drystar dry pump will also be supplied with a full accessory fitting kit and will be mounted to the dedicated chassis and castors to enable easy movement of the pump. There is no special control system requirements for pump operation, existing electrical control equipment can be modified to provide simple off/on operation and interface to the (fitted) pump thermal snap switches. Details of how to achieve this are available in the Drystar 80 Electrical Box upgrade guide."文件
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EDWARDS
QDP80
类别
Pumps / Compressor
上次验证： 60 多天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
97010
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
CVD, Furnace, Etch, RTPOEM 型号描述
"The QDP80 DRYSTAR Dry pump is available as a stand alone unit or in combination with a QMB500hydrokinetic drive mechanical booster, for applications where more pumping speed and/or lower vacuum levels are required - no pressure switches required. The scope of supply includes as standard an in-line pressure regulator and gauge for facilitating the shaft seal purge, a cleanable stainless steel exhaust silencer, and exhaust check valve. The QDP80 Drystar dry pump will also be supplied with a full accessory fitting kit and will be mounted to the dedicated chassis and castors to enable easy movement of the pump. There is no special control system requirements for pump operation, existing electrical control equipment can be modified to provide simple off/on operation and interface to the (fitted) pump thermal snap switches. Details of how to achieve this are available in the Drystar 80 Electrical Box upgrade guide."文件
无文件