说明
Technical Data Displacement (swept volume) 60 Hz 6.7cfm Speed (Pneurop) 60 Hz 5.8 cfm Ultimate vacuum without gas ballast 0.75×10-5 torr (partial pressure) without gas ballast (totalpressure) 0.75×10-4 torr with gas ballast (partial pressure) 2.25×10-2 torr Inlet connection NW25 flange with 15 mm nozzle alternative Outlet connection Nozzle 15 mm external diameter Maximum inlet pressure for water vapor 11 torr Weight 50lb Motor 50 Hz 0.37 kW Motor 60 Hz 0.37 kW Oil capacity-maximum 0.55 liter minimum 0.43 liter Recommended Edwards oil Supergrade A配置
无配置OEM 型号描述
Vacuum pump文件
无文件
EDWARDS
E2M8
类别
Pumps / Compressor
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
125491
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Technical Data Displacement (swept volume) 60 Hz 6.7cfm Speed (Pneurop) 60 Hz 5.8 cfm Ultimate vacuum without gas ballast 0.75×10-5 torr (partial pressure) without gas ballast (totalpressure) 0.75×10-4 torr with gas ballast (partial pressure) 2.25×10-2 torr Inlet connection NW25 flange with 15 mm nozzle alternative Outlet connection Nozzle 15 mm external diameter Maximum inlet pressure for water vapor 11 torr Weight 50lb Motor 50 Hz 0.37 kW Motor 60 Hz 0.37 kW Oil capacity-maximum 0.55 liter minimum 0.43 liter Recommended Edwards oil Supergrade A配置
无配置OEM 型号描述
Vacuum pump文件
无文件