说明
Cluster Sputtering Tools配置
Equipped with 2 Degas-Orienter, one Preclean II Chamber, 3 Narrow Body PVD Chambers and two Wide-Body PVD Chambers.OEM 型号描述
AMAT leveraged its expertise in single-wafer, multichamber architecture to develop an evolutionary platform called the Endura 5500 PVD (physical vapor deposition) in 1990 featuring a staged, ultra-high vacuum architecture for the rapid sputtering of aluminum and other metal films used to form the circuit interconnections on advanced devices.文件
无文件
类别
PVD / Sputtering
上次验证： 9 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
156339
晶圆尺寸：
6"/150mm
年份：
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
ENDURA 5500
类别
PVD / Sputtering
上次验证： 9 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
156339
晶圆尺寸：
6"/150mm
年份：
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Cluster Sputtering Tools配置
Equipped with 2 Degas-Orienter, one Preclean II Chamber, 3 Narrow Body PVD Chambers and two Wide-Body PVD Chambers.OEM 型号描述
AMAT leveraged its expertise in single-wafer, multichamber architecture to develop an evolutionary platform called the Endura 5500 PVD (physical vapor deposition) in 1990 featuring a staged, ultra-high vacuum architecture for the rapid sputtering of aluminum and other metal films used to form the circuit interconnections on advanced devices.文件
无文件