说明
Nimbus 314XP High Throughput Sputter Deposition system Details Attached配置
Software WinXP, Nimbus Version 3.18 Configured for 200mm / 8” (100mm / 4” and 150mm / 6” capable) 3 – Cassette platforms Load Lock / Cooling Station Pre-Etch Chamber Sputter chamber, five position source pentagon, two magnatrons installed (M4-DC & G-1, need to be verified). 3 – CTI 8 cryo pumps, 1 – etch chamber, 2 – sputter chamberOEM 型号描述
未提供文件
类别
PVD / Sputtering
上次验证： 16 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
139826
晶圆尺寸：
未知
年份：
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASM / TEL / NEXX
NIMBUS 314
类别
PVD / Sputtering
上次验证： 16 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
139826
晶圆尺寸：
未知
年份：
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available