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说明
Materials used – Ta2O5, Nb2O5, SiO2 S2 (faulty, for Ta, Nb) SSC 300/320 RT DC, P/N 3010838/001 S3 (for Ta, Nb) SSC 300/320 RT RF, P/N 3022523/001 S6 ( Si) SSC 300/320 RT RF, P/N 3022883/001 Ion source S4 PSC 301 P/N n/a DC AE pinnacle plus 10kW M/N 3152536-360 E DC AE pinnacle plus 10kW M/N 3152536-360 E AE Cesar 1320 RF power generator 2kW M/N 61300073 J (condition unknown) AE Cesar 1350 RF power generator 5kW M/N 61300109 L AE navio match network M/N 3155403-001 B AE navio match network M/N 3155405-001 C (condition unknown) AE navio match network M/N 3155405-001 C (condition unknown) TDK-Lambda GENH30-25 LOC-519A163-0001 2pc Manuals/pdf's attached below Comes with CLIVET WSA-XIN131配置
2x magnetrons RF plasma source - Circular PSC 301 GSM 1100 Broadband Monitoring System 14 planet batch module + witness Single cassette load-lockOEM 型号描述
未提供文件
类别
PVD / Sputtering
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
84201
晶圆尺寸：
未知
年份：
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / BALZERS
RADIANCE
类别
PVD / Sputtering
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
84201
晶圆尺寸：
未知
年份：
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available