说明
Target size: φ4 inch, Number of targets: 3 Substrate size: 150 mm, Power supply for sputtering: RF/DC power supply, Substrate heating performance: Max . /min Target 0.25MPa3.0?/min Air pressure 0.5~0.8MPa Mass 1.2t Outer size W2440 D1100 H1600 ・ Controller box Outer size W590 D1010 H1850 Power supply box ② Outer size W560 D700 H1780 Cryocompressor CR420 Three-phase 200V 50/60Hz 2.4 /2.5? Rotary Pump Alcatel 2033 SD配置
无配置OEM 型号描述
未提供文件
无文件
CANON / ANELVA
L-430S-FHL
已验证
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
70803
晶圆尺寸：
未知
年份：
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON / ANELVA
L-430S-FHL
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
70803
晶圆尺寸：
未知
年份：
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Target size: φ4 inch, Number of targets: 3 Substrate size: 150 mm, Power supply for sputtering: RF/DC power supply, Substrate heating performance: Max . /min Target 0.25MPa3.0?/min Air pressure 0.5~0.8MPa Mass 1.2t Outer size W2440 D1100 H1600 ・ Controller box Outer size W590 D1010 H1850 Power supply box ② Outer size W560 D700 H1780 Cryocompressor CR420 Three-phase 200V 50/60Hz 2.4 /2.5? Rotary Pump Alcatel 2033 SD配置
无配置OEM 型号描述
未提供文件
无文件