说明
Denton Vacuum Explorer 14 Three Target RF and DC Sputtering System. Vacuum deposition system designed for thin film applications. All process variables are controlled by system computer via graphical user interface. System was upgraded by Denton in 2012 at the factory to include RF/DC magnetron sputtering and software update. System has three 4” diameter magnetron cathodes. Three MKS mass flow controllers for process gas input. 12-inch diameter rotating substrate carrier is heated by quartz lamp under platen. CTI cryopump with compressor and roughing pump. System has scratches on paint from shipping.配置
无配置OEM 型号描述
Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering System文件
无文件
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
121010
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DENTON VACUUM
EXPLORER 14
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
121010
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Denton Vacuum Explorer 14 Three Target RF and DC Sputtering System. Vacuum deposition system designed for thin film applications. All process variables are controlled by system computer via graphical user interface. System was upgraded by Denton in 2012 at the factory to include RF/DC magnetron sputtering and software update. System has three 4” diameter magnetron cathodes. Three MKS mass flow controllers for process gas input. 12-inch diameter rotating substrate carrier is heated by quartz lamp under platen. CTI cryopump with compressor and roughing pump. System has scratches on paint from shipping.配置
无配置OEM 型号描述
Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering System文件
无文件