说明
Details Attached Metals/Chemicals used: LiCO, LiPON, and Li ELECTROLYTE DEPOSITION SYSTEM, DENTON VACUUM, CO. #DT000, MDL. RELIANT, MFG. 3/07, LIST SHOWS RELIANT RF SPUTTER SYSTEM WITH LIPON DEPOSITION TOOL, 2' X 2' X 3' HIGH STEEL CHAMBER, (2) ANGSTROM SCIENCES RF CATHODES WITH POWER SUPPLIES/CONTROLLERS, (2) RF TUNERS, CTI CRYOGENICS CRYO-TORR 8 CRYOGENIC PUMP WITH MONITOR, KYKY TURBO PUMP WITH MDL. 1200H CONTROLLER, (2) ADVANCED ENERGY DRESSLER CESAR RF POWER GENERATORS, RELATED PRESSURE MONITORS, ISOLATION VALVES, B&W MDL. TRP-90 VACUUM PUMP, STAND ALONE POWER SUPPLY/CONTROL, COMPUTER CONTROL SYSTEM, RELATED HARDWARE, SOFTWARE, (2) VAT GATE VALVES, CTI CRYOGENICS 8200 COMPRESSOR, ALL RELATED EQUIPMENT, COMPONENTS配置
无配置OEM 型号描述
未提供文件
类别
PVD / Sputtering
上次验证： 7 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
131867
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DENTON VACUUM
EXPLORER
类别
PVD / Sputtering
上次验证： 7 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
131867
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available