说明
PVD system配置
(Qty 3) PVD chambers, positions 3/4/5 Degas chamber, position 1 PM5 hot chuck and pyrometer Brooks control system upgrade (2025) with new aligner Brooks Magnatran MAG 7.1 dual-pan robot, up to 860mm extension Brooks control system with CDM (Qty 2) Load-lock elevators Adapter flange for active wafer centering Transport coolerOEM 型号描述
未提供文件
无文件
类别
PVD / Sputtering
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
155365
晶圆尺寸：
未知
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / UNAXIS / OERLIKON / BALZERS
CLUSTERLINE 200 II CW
类别
PVD / Sputtering
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
155365
晶圆尺寸：
未知
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
PVD system配置
(Qty 3) PVD chambers, positions 3/4/5 Degas chamber, position 1 PM5 hot chuck and pyrometer Brooks control system upgrade (2025) with new aligner Brooks Magnatran MAG 7.1 dual-pan robot, up to 860mm extension Brooks control system with CDM (Qty 2) Load-lock elevators Adapter flange for active wafer centering Transport coolerOEM 型号描述
未提供文件
无文件