说明
Sputtering System配置
CTI CT-8 cryo pump and water cooled compressor • Leybold Mech Pump • HVA hivac valve • MKS variable throttle valve • 4 Torus-magnetron target assemblies, • 2 gas system with 2 Vac Gen UltraFlo MFCs • Capacitance Manometer, MKS with 270 controller • AC power box with breakers • Manual control panel • G.P.-307 I.G. controller with dual I.G. readouts • Water flow panel with 4 Proteus flow meters • 1 A.E. MDX-1, 1Kw dc power supplies • 1 A.E. 600w RF generator • 1 A.E. RF matching unit • Superior stepper motor control for table motion • 4 6” pallet positions • Backside heater assembly with TC • Stepper motor controlledOEM 型号描述
未提供文件
无文件
类别
PVD / Sputtering
上次验证： 10 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
156149
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KURT J LESKER
CMS-18
类别
PVD / Sputtering
上次验证： 10 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
156149
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Sputtering System配置
CTI CT-8 cryo pump and water cooled compressor • Leybold Mech Pump • HVA hivac valve • MKS variable throttle valve • 4 Torus-magnetron target assemblies, • 2 gas system with 2 Vac Gen UltraFlo MFCs • Capacitance Manometer, MKS with 270 controller • AC power box with breakers • Manual control panel • G.P.-307 I.G. controller with dual I.G. readouts • Water flow panel with 4 Proteus flow meters • 1 A.E. MDX-1, 1Kw dc power supplies • 1 A.E. 600w RF generator • 1 A.E. RF matching unit • Superior stepper motor control for table motion • 4 6” pallet positions • Backside heater assembly with TC • Stepper motor controlledOEM 型号描述
未提供文件
无文件