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说明
In-Line Sputtering System Vacuum System: Diffusion Pumped Load Lock Included: Yes Power Requirements: 208 V, 100.0 A(2), 60 Hz, 3 Phase Exterior Dimensions: - Width: 67.000 in (170.2 cm) - Depth: 36.000 in (91.4 cm) - Height: 59.000 in (149.9 cm) Weight: 2,700 lbs. (1,225 kg)配置
无配置OEM 型号描述
未提供文件
无文件
MRC
902
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
84775
晶圆尺寸：
未知
年份：
未知
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说明
In-Line Sputtering System Vacuum System: Diffusion Pumped Load Lock Included: Yes Power Requirements: 208 V, 100.0 A(2), 60 Hz, 3 Phase Exterior Dimensions: - Width: 67.000 in (170.2 cm) - Depth: 36.000 in (91.4 cm) - Height: 59.000 in (149.9 cm) Weight: 2,700 lbs. (1,225 kg)配置
无配置OEM 型号描述
未提供文件
无文件