说明
无说明配置
(4) 8 inch cathodes Magnetrons capability Load lock 2 gas lines with MF Chamber heating function capability CTI Cyo pump. DC magnetron Sputter, RF Diode Sputter, RF magnetron Sputter Maximum 4 of 8 inch cathode. Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode Small sample to 6 inch wafer 1-2 gas lines with MFC RF Etch Bias function Loadlock heating function Chamber heating function (Occupy one cathode port). Co-Sputter function Reactive sputter functionOEM 型号描述
未提供文件
无文件
类别
PVD / Sputtering
上次验证： 7 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
138641
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PERKIN ELMER
4410
类别
PVD / Sputtering
上次验证： 7 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
138641
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
(4) 8 inch cathodes Magnetrons capability Load lock 2 gas lines with MF Chamber heating function capability CTI Cyo pump. DC magnetron Sputter, RF Diode Sputter, RF magnetron Sputter Maximum 4 of 8 inch cathode. Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode Small sample to 6 inch wafer 1-2 gas lines with MFC RF Etch Bias function Loadlock heating function Chamber heating function (Occupy one cathode port). Co-Sputter function Reactive sputter functionOEM 型号描述
未提供文件
无文件