SV-6040
概述
Standard exhaust system: 12” Cryopump Ultimate pressure: 6.7e-5Pa Depot direction: side Deposition Area Uniformity Stationary Rotation: L300mm±10%
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Standard exhaust system: 12” Cryopump Ultimate pressure: 6.7e-5Pa Depot direction: side Deposition Area Uniformity Stationary Rotation: L300mm±10%
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检验、保险、评估、物流