说明
无说明配置
Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 PhaseOEM 型号描述
未提供文件
无文件
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
113066
晶圆尺寸：
4"/100mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部
NOVELLUS / VARIAN
3190
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
113066
晶圆尺寸：
4"/100mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 PhaseOEM 型号描述
未提供文件
无文件