概述

AWgage-200 measures sheet resistance in ohms per square or milliohms per square. If specific resistivity is known, the thickness of the deposited film layer can be computed from the sheet resistance. The choice of measurement data is easily get in the software. AWgage-200 can accommodate 200mm (8″) wafers as well as the standard 6″, 5″, and 4″ wafers without any hardware change.