概述

The RS-100 is a production-worthy resistivity measurement system used in nearly all fabs worldwide. It provides advanced automation and improved edge performance for 300mm wafers. It has accurate and repeatable resistivity measurements up to 1mm from the conductive film edge, patented temperature compensation, and easy-to-use software. It is used in metal deposition, CMP, ion implantation, and diffusion. Its enhanced edge performance provides greater insight into process control variance and lowers cost-of-ownership.