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KLA RS35
  • KLA RS35
  • KLA RS35
  • KLA RS35
说明
Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room
配置
*. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHg
OEM 型号描述
未提供
文件

无文件

verified-listing-icon

已验证

类别
Resistivity / Four Point Probe

上次验证: 60 多天前

物品主要详细信息

状况:

Refurbished


运行状况:

未知


产品编号:

66001


晶圆尺寸:

8"/200mm


年份:

1998


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

KLA

RS35

verified-listing-icon
已验证
类别
Resistivity / Four Point Probe
上次验证: 60 多天前
listing-photo-1991d9ffc107489d8d1d5ce04ce67711-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
物品主要详细信息

状况:

Refurbished


运行状况:

未知


产品编号:

66001


晶圆尺寸:

8"/200mm


年份:

1998


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room
配置
*. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHg
OEM 型号描述
未提供
文件

无文件