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KLA RS75/tc
    说明
    无说明
    配置
    无配置
    OEM 型号描述
    The OmniMap® RS75/tc is a resistivity mapping system designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical, such as ion implantation, metallization, diffusion, epitaxy and polysilicon. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. With measurement speed of approximately 1 second per test site, the tool can process a 25-slot cassette of 200mm wafers at over 100 wafers per hour. This includes five-site monitoring, with automatic temperature compensation and flat alignment. The RS75 series is offered in a variety of configurations to meet customer production requirements.
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    verified-listing-icon

    已验证

    类别
    Resistivity / Four Point Probe

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    120926


    晶圆尺寸:

    未知


    年份:

    2000


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available

    KLA

    RS75/tc

    verified-listing-icon
    已验证
    类别
    Resistivity / Four Point Probe
    上次验证: 60 多天前
    listing-photo-fb2790bd800b45388b1420073201a1a9-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/75229/fb2790bd800b45388b1420073201a1a9/59bdb1e482ab4f158e6dda79c5dbf94c_7224718ae39f4892b7dd5f02a82183d31201a_mw.jpeg
    listing-photo-fb2790bd800b45388b1420073201a1a9-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/75229/fb2790bd800b45388b1420073201a1a9/d77fceb605ee4d49865f0fa14881f0d3_bd272ef9bccb4798b7d80732fbffac951201a_mw.jpeg
    listing-photo-fb2790bd800b45388b1420073201a1a9-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/75229/fb2790bd800b45388b1420073201a1a9/9f8ac14f5e4740fdab1b736285b06a01_956809ccf0f743bf8b32f3ee68a13c5b1201a_mw.jpeg
    listing-photo-fb2790bd800b45388b1420073201a1a9-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/75229/fb2790bd800b45388b1420073201a1a9/5d9257969384443a949558e555ad907e_eafe487388464c65b7737bf0599a2f28_mw.jpeg
    listing-photo-fb2790bd800b45388b1420073201a1a9-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/75229/fb2790bd800b45388b1420073201a1a9/80e80be6b53549058c524fe65bbdd7b5_0cb42f6e9ab94f79b61ad091e150096b1201a_mw.jpeg
    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    120926


    晶圆尺寸:

    未知


    年份:

    2000


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    无说明
    配置
    无配置
    OEM 型号描述
    The OmniMap® RS75/tc is a resistivity mapping system designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical, such as ion implantation, metallization, diffusion, epitaxy and polysilicon. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. With measurement speed of approximately 1 second per test site, the tool can process a 25-slot cassette of 200mm wafers at over 100 wafers per hour. This includes five-site monitoring, with automatic temperature compensation and flat alignment. The RS75 series is offered in a variety of configurations to meet customer production requirements.
    文件

    无文件