
说明
3/1/26配置
无配置OEM 型号描述
The LDS 3000 allows fully automatic defect monitoring in all process steps. All types of yield limiting visual defects on single layer or multi-layer patterned wafers will be detected, including thin film-, photo-, -etch- and the cleaning-process will be detected. Beside the micro the LDS 3000 can be equipped optionally also with fully automatic macro inspection.文件
无文件
类别
Reticle / Mask Inspection
上次验证: 13 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
148141
晶圆尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / VISTEC / LEICA
LDS3000
类别
Reticle / Mask Inspection
上次验证: 13 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
148141
晶圆尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
3/1/26配置
无配置OEM 型号描述
The LDS 3000 allows fully automatic defect monitoring in all process steps. All types of yield limiting visual defects on single layer or multi-layer patterned wafers will be detected, including thin film-, photo-, -etch- and the cleaning-process will be detected. Beside the micro the LDS 3000 can be equipped optionally also with fully automatic macro inspection.文件
无文件