说明
无说明配置
- 2ch:Via/CW PM1/2OEM 型号描述
Lam's TCP product line of high-density, low-pressure etch systems, which was introduced in late 1992, incorporates the Company's patented Transformer Coupled Plasma source technology for etching 0.25 micron and smaller geometries. The Company currently offers the TCP 9600SEII and TCP 9600PTX for metal etch applications, the TCP 9400SEII and TCP 9400PTX for polysilicon, polycide and shallow trench isolation etch applications and the TCP 9100 and TCP 9100PTX for oxide etch applications.文件
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LAM RESEARCH CORPORATION
TCP 9100PTX
已验证
类别
RIE
上次验证: 30 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
31624
晶圆尺寸:
8"/200mm
年份:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TCP 9100PTX
类别
RIE
上次验证: 30 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
31624
晶圆尺寸:
8"/200mm
年份:
2000
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
- 2ch:Via/CW PM1/2OEM 型号描述
Lam's TCP product line of high-density, low-pressure etch systems, which was introduced in late 1992, incorporates the Company's patented Transformer Coupled Plasma source technology for etching 0.25 micron and smaller geometries. The Company currently offers the TCP 9600SEII and TCP 9600PTX for metal etch applications, the TCP 9400SEII and TCP 9400PTX for polysilicon, polycide and shallow trench isolation etch applications and the TCP 9100 and TCP 9100PTX for oxide etch applications.文件
无文件