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说明
The AccuThermo AW820R is production-proven stand alone automatic atmospheric RTP (Rapid Thermal Processing) system, which uses high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures. The process periods are typically 1-900 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities combined with the heating chamber's cold-wall design and superior heating uniformity provide significant advantages over conventional furnace processing. The AccuThermo AW820R comes with an integrated solid robotic wafer transfer instead of the old robot & controller system.配置
无配置OEM 型号描述
AccuThermo AW820R is production-proven stand alone automatic atmospheric RTP (Rapid Thermal Processing) system, which uses high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures. The process periods are typically 1-900 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities, combined with the heating chamber's cold-wall design and superior heating uniformity, provide significant advantages over conventional furnace processing.文件
类别
RTP/RTA
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
73185
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ALLWIN21 / AG ASSOCIATES
AccuThermo AW820R
类别
RTP/RTA
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
73185
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available