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说明
RTP配置
1-1. Factory Interface 5.3X ITEM Y(O) / N(X) Yaskawa Dual Arm Robot (XU-RC350D-1B06) O Robot Controller (ERCR-NS01-B004-E1) O Track assembly (XU-ACT101L-G10) O Pre-Aligner O 3 Load Port O Server : Supermicro(QTY.4) O 1-2. Process Chamber(A/B) ITEM Y(O) / N(X) Vulcan ATM, Bottom Heating, Spike Anneal O WRLD Maglev System O IGS Gas Stick MFC Panel O Multi-Zone Lamp Driver O Pyrometers OOEM 型号描述
未提供文件
类别
RTP/RTA
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
96900
晶圆尺寸：
12"/300mm
年份：
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
VANTAGE VULCAN
类别
RTP/RTA
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
96900
晶圆尺寸：
12"/300mm
年份：
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available