说明
Single Chamber RTP Rapid Thermal Annealing Oxide & Nitride Film Deposition Cassette to Cassette Handling of 4”-6” Wafers 2 Axis Robot for Transporting Wafers to Heating Chamber 400°C to 1300°C Temperature Range Programmable 0-600 sec Steady State Process Time 120 Wafers/Hour Null Cycle (Zero Processing Time) Wafer Cooldown Stage Full Range Dual Pyrometer SECS Communications配置
无配置OEM 型号描述
未提供文件
无文件
MATTSON / STEAG / AST
HEATPULSE 2146
已验证
类别
RTP/RTA
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
15979
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
MATTSON / STEAG / AST
HEATPULSE 2146
类别
RTP/RTA
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
15979
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Single Chamber RTP Rapid Thermal Annealing Oxide & Nitride Film Deposition Cassette to Cassette Handling of 4”-6” Wafers 2 Axis Robot for Transporting Wafers to Heating Chamber 400°C to 1300°C Temperature Range Programmable 0-600 sec Steady State Process Time 120 Wafers/Hour Null Cycle (Zero Processing Time) Wafer Cooldown Stage Full Range Dual Pyrometer SECS Communications配置
无配置OEM 型号描述
未提供文件
无文件