说明
Standalone RTP Equipment配置
无配置OEM 型号描述
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.文件
无文件
MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
已验证
类别
RTP/RTA
上次验证： 19 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
113895
晶圆尺寸：
6"/150mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
类别
RTP/RTA
上次验证： 19 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
113895
晶圆尺寸：
6"/150mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Standalone RTP Equipment配置
无配置OEM 型号描述
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.文件
无文件