说明
The Hitachi SCDS is designed for processing PFC gases used in semiconductor fabrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6. The Hitachi SCDS offers superior cost of ownership versus Capture/Re-cycle; Combustion; or Chemical Conversion technologies since it uses little electricity, only 1 gpm of water, and has a catalyst lifetime of more than 4,600 hours. The SCDS-60 has a footprint of only 37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.配置
无配置OEM 型号描述
未提供文件
无文件
HITACHI
SCDS CD-60
已验证
类别
Scrubbers - Process Gases
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
43476
晶圆尺寸：
未知
年份：
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
HITACHI
SCDS CD-60
已验证
类别
Scrubbers - Process Gases
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
43476
晶圆尺寸：
未知
年份：
2000
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
The Hitachi SCDS is designed for processing PFC gases used in semiconductor fabrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6. The Hitachi SCDS offers superior cost of ownership versus Capture/Re-cycle; Combustion; or Chemical Conversion technologies since it uses little electricity, only 1 gpm of water, and has a catalyst lifetime of more than 4,600 hours. The SCDS-60 has a footprint of only 37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.配置
无配置OEM 型号描述
未提供文件
无文件