THERMOFISHER SCIENTIFIC / FEI / MICRION 9800

说明

Micrion 9800FlipChip / FEI BDS Vectra FIB Ion Milling System, w/ Varian StarCell ion pumps, FEI 4035 273 31131 X1 preamp, Keysight 5517C HeNe laser s/n US49480346, Agilent TV1001 turbopump, Varian Tubo-V 10 controller. Serial no. 8060 / 2013-15570. As is. Functionality unknown. Includes: control cabinet w/ 2ea Keithley 6485 picoammeters, FEI PIR camera controller; control cabinet w/ Micrion servo controller, industrial control PCs, HV power supply, Micrion system control chassis, Micrion vacuum controller, 4ea MKS 244 pressure/flow controllers, 2ea Varian MiniVac controllers, Varian Turbo-V 1000HT vacuum controller; gas delivery cabinets; 2ea control PCs; 1ea sample alignment scope fixture; parts, stages, fixtures, drawings & components, contents of 2ea storage cabinets, as pictured. Some parts not functional, for components. in x in x in H.

配置

无配置

OEM 型号描述

The Micrion 9800 is used primarily for circuit modification and is differentiated from the 9000 Series principally by its substrate handling capabilities. In automated circuit modification applications, x/y navigation is required to be more accurate but the workpiece does not need to be tilted. In circuit modification, however, navigation on a substrate to an accuracy of better than 0.25 microns is desired. To achieve this higher accuracy, Micrion equips such systems with x/y stages in which stage position is monitored by a laser interferometer. This type of measurement technique is the most accurate available and at the present time only Micrion FIB systems offer this feature. The handling and positioning capability of the Micrion 9800 is valuable since it permits a large number of complex modifications to be programmed and automated, eliminating operator error in making the modifications.