说明
Scanning Electron Microscope (SEM)配置
Pump and chiller Known issues: Turbopump requires replacement High stability Schottky field emission gun; Fast chamber evacuation: 2 min; 0.2 to 30 kV; Beam deceleration with stage bias from -150 V to -4 kV; Lowest landing energy 50 V; Optimal high vacuum image resolution: 1.6 nm at 1 kV; 1.0 nm at 15 kV; High vacuum SED, in-lens (TLD), EDX, vCD (high sensitivity low kV BSE) detectors; Optimal low vacuum image resolution: 2.0 nm; Low vacuum LVD, LVD/Helix, GAD (TV-rate solid-state BSE), EDX, vCD (high sensitivity low kV BSE) detectors; 5-axes motorized stage; z axis movable up to 60 mm; -5°/+70° tiltOEM 型号描述
未提供文件
无文件
类别
SEM / FIB
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153433
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
THERMOFISHER SCIENTIFIC / FEI / PHILIPS
NOVA NANOSEM 430
类别
SEM / FIB
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153433
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Scanning Electron Microscope (SEM)配置
Pump and chiller Known issues: Turbopump requires replacement High stability Schottky field emission gun; Fast chamber evacuation: 2 min; 0.2 to 30 kV; Beam deceleration with stage bias from -150 V to -4 kV; Lowest landing energy 50 V; Optimal high vacuum image resolution: 1.6 nm at 1 kV; 1.0 nm at 15 kV; High vacuum SED, in-lens (TLD), EDX, vCD (high sensitivity low kV BSE) detectors; Optimal low vacuum image resolution: 2.0 nm; Low vacuum LVD, LVD/Helix, GAD (TV-rate solid-state BSE), EDX, vCD (high sensitivity low kV BSE) detectors; 5-axes motorized stage; z axis movable up to 60 mm; -5°/+70° tiltOEM 型号描述
未提供文件
无文件