概述

FEI’s Strata 400 STEM is a high-resolution analytical tool designed to support the increasing need for high-resolution analytical capabilities as device geometries shrink below 100 nm and new material systems are introduced. It includes integrated sample lift-out and handling, with SEM-STEM imaging to enable high-contrast, high-resolution analysis. The innovative Flipstage™ moves the sample from milling to STEM-imaging position in seconds, without breaking vacuum, while the new Sidewinder™ ion column provides improved sample throughput and ultimate sample quality.