说明
Focused Ion Beam配置
Full details attached below Vacuum system: EDWARDS XDS10 Scroll pump Sample stage: 5-Axes motorized X-Y-Z-rotate-tilt stage Step size: 100 nm (Minimum) High vacuum: 10^-10 mbar Travel: X, Y-Axis: 150 mm Z-Axis: 10 mm Tilt range: -5° to +60°OEM 型号描述
The Helios NanoLab 600 is a Dual Beam FIB/SEM (Focused Ion Beam/Scanning Electron Microscope) that is designed for high-end imaging during failure analysis. It features an extreme high-resolution column, a fine-probe ion source, and a 150 x 150 mm, five-axis, XY piezo stage. This makes it a smart investment for failure-analysis labs that require versatile sample handling, from packaged parts to eight-inch wafers. The Helios NanoLab 600 is particularly useful for cross-sectioning samples and delivers three-dimensional imaging, allowing you to quickly and efficiently locate and view device features from different angles. Additionally, patented beam chemistries can be used to highlight interface layers for imaging in the system, providing you with the most accurate data possible without additional preparation steps outside the system.文件
THERMOFISHER SCIENTIFIC / FEI / PHILLIPS
HELIOS NANOLAB 600
已验证
类别
SEM / FIB
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
116982
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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THERMOFISHER SCIENTIFIC / FEI / PHILLIPS
HELIOS NANOLAB 600
类别
SEM / FIB
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
116982
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available