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说明
SEM配置
SEM, Large Sample Chamber (maximum 300mm diameter), 5-axis MD, Camera Navigation, Secondary/Reflection Electrons, Low Vacuum Secondary Electron Detector ESED-II, EDX HORIBA EMAX Evolution X Max50 EX470OEM 型号描述
S-3700N is designed as a new series of Tungsten-type VP-SEM to accommodate sample diameters up to 300mm using a new large specimen chamber and a large specimen stage. Moreover, simultaneous accommodations of accessory attachments for EDX, WDX and EBSP (*1) analyses are possible at optimized analytical geometry. The specimen stage has a wide traverse range for observation of sample areas up to 203mm diameter and up to 110mm height with EDX and WDX analysis.文件
无文件
HITACHI
S-3700N
类别
SEM / FIB
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
116067
晶圆尺寸：
未知
年份：
2017
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说明
SEM配置
SEM, Large Sample Chamber (maximum 300mm diameter), 5-axis MD, Camera Navigation, Secondary/Reflection Electrons, Low Vacuum Secondary Electron Detector ESED-II, EDX HORIBA EMAX Evolution X Max50 EX470OEM 型号描述
S-3700N is designed as a new series of Tungsten-type VP-SEM to accommodate sample diameters up to 300mm using a new large specimen chamber and a large specimen stage. Moreover, simultaneous accommodations of accessory attachments for EDX, WDX and EBSP (*1) analyses are possible at optimized analytical geometry. The specimen stage has a wide traverse range for observation of sample areas up to 203mm diameter and up to 110mm height with EDX and WDX analysis.文件
无文件