说明
Hitachi SU8040 w/o EDS配置
Process Type: FA SEMs/TEMs/Dual Beams Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, Deceleration mode) Secondary electron detectors: Top, upper and lower Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 Axis Hitachi Regulus Stage Type I: X: 0 ~ 110mm; Y: 0 ~ 80mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Maximum sample size: 150mm Stage Repeatability less than +/- 0.5 microns Configuration: Operating System: Windows 7 Options: EDX, BSE, STEMOEM 型号描述
the SU8040 that features a newly developed Regulus Stage. The Regulus stage has the capability that can be operated smoothly even at ultra high resolution. The Regulus stage has adopted a high reliable conventional motor drive, but the capability has been greatly improved thanks to the newly developed motor drivetrain. Now the Regulus stage can achieve seamless stage operation and high throughput observation without any stress.文件
无文件
HITACHI
SU8040
类别
SEM / FIB
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
117550
晶圆尺寸：
未知
年份：
2012
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Hitachi SU8040 w/o EDS配置
Process Type: FA SEMs/TEMs/Dual Beams Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, Deceleration mode) Secondary electron detectors: Top, upper and lower Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 Axis Hitachi Regulus Stage Type I: X: 0 ~ 110mm; Y: 0 ~ 80mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Maximum sample size: 150mm Stage Repeatability less than +/- 0.5 microns Configuration: Operating System: Windows 7 Options: EDX, BSE, STEMOEM 型号描述
the SU8040 that features a newly developed Regulus Stage. The Regulus stage has the capability that can be operated smoothly even at ultra high resolution. The Regulus stage has adopted a high reliable conventional motor drive, but the capability has been greatly improved thanks to the newly developed motor drivetrain. Now the Regulus stage can achieve seamless stage operation and high throughput observation without any stress.文件
无文件