说明
JEOL JXA-8530F Field Emission Electron Probe Microanalyzer (EPMA) with JEOL XEDS & xCLent Cathodoluminescence - This EPMA’s field emission electron gun produces a probe that is only 1/2 to 1/10 the size of that produced in a thermionic emission electron gun in a conventional EPMA, using a tungsten filament or a LaB6 tip. The FE electron gun is capable of producing a microprobe at low accelerating voltage even with high probe currents (10 to 100 nA), allowing for wavelength dispersive spectroscopy with high X-ray spatial resolution.配置
- Detectable Elements: - WDS: (Be*) B to U - EDS: B to U - X-Ray Range: - WDS: 0.087 to 9.3 nm - EDS energy range: 20keV - Maximum Sample Size: 100mm x 100mm x 50mm (H) - Accelerating Voltage: 1 to 30 kV (0.1 kV steps) - Probe Current Range: 10-12 to 5x10-7 - Beam Current Stability: ± 0.3%/h - 3 nm (WD 11 mm, 30kV) - Minimum Probe Size: - 40nm (10kV, 1x10-8A) - 100nm (10kV, 1x10-7A) - Scanning Magnification: 40 to 300,000x (WD 11mm) - Scanning Image Resolution: Maximum 5120 x 3840OEM 型号描述
Field Emission Electron Probe Microanalyzer文件
无文件
JEOL
JXA-8530F
类别
SEM / FIB
上次验证： 4 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147931
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
JEOL JXA-8530F Field Emission Electron Probe Microanalyzer (EPMA) with JEOL XEDS & xCLent Cathodoluminescence - This EPMA’s field emission electron gun produces a probe that is only 1/2 to 1/10 the size of that produced in a thermionic emission electron gun in a conventional EPMA, using a tungsten filament or a LaB6 tip. The FE electron gun is capable of producing a microprobe at low accelerating voltage even with high probe currents (10 to 100 nA), allowing for wavelength dispersive spectroscopy with high X-ray spatial resolution.配置
- Detectable Elements: - WDS: (Be*) B to U - EDS: B to U - X-Ray Range: - WDS: 0.087 to 9.3 nm - EDS energy range: 20keV - Maximum Sample Size: 100mm x 100mm x 50mm (H) - Accelerating Voltage: 1 to 30 kV (0.1 kV steps) - Probe Current Range: 10-12 to 5x10-7 - Beam Current Stability: ± 0.3%/h - 3 nm (WD 11 mm, 30kV) - Minimum Probe Size: - 40nm (10kV, 1x10-8A) - 100nm (10kV, 1x10-7A) - Scanning Magnification: 40 to 300,000x (WD 11mm) - Scanning Image Resolution: Maximum 5120 x 3840OEM 型号描述
Field Emission Electron Probe Microanalyzer文件
无文件