说明
无说明配置
6" stage and loadlock. 6” wafer loading thru the loadlock is possible. Fjeld 6” loadlock and stage. Schottky field emission gun In-lens SE & E-T SE detectors Capable of 1nm resolution at 20kV 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door Upgraded to uniplinth. Runs Smartsem v5. Known issues: Some Flickering on image of chamberscope. Upgraded with integrated Current monitor on stage, readable in software. Comes with a variety of sample and wafer holders.OEM 型号描述
未提供文件
无文件
ZEISS / CARL ZEISS
1560
已验证
类别
SEM
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
Installed / Idle
产品编号:
96898
晶圆尺寸:
4"/100mm, 6"/150mm
年份:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ZEISS / CARL ZEISS
1560
类别
SEM
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
Installed / Idle
产品编号:
96898
晶圆尺寸:
4"/100mm, 6"/150mm
年份:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
6" stage and loadlock. 6” wafer loading thru the loadlock is possible. Fjeld 6” loadlock and stage. Schottky field emission gun In-lens SE & E-T SE detectors Capable of 1nm resolution at 20kV 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door Upgraded to uniplinth. Runs Smartsem v5. Known issues: Some Flickering on image of chamberscope. Upgraded with integrated Current monitor on stage, readable in software. Comes with a variety of sample and wafer holders.OEM 型号描述
未提供文件
无文件