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说明
无说明配置
无配置OEM 型号描述
The CAMECA IMS-6f is an ultra-high vacuum (UHV) system designed for secondary ion mass spectrometry (SIMS) analysis. Equipped with a magnetic sector analyzer, it offers exceptional mass resolving power, with a minimum m/Dm of 25000 (10% definition). The system features a duoplasmatron source that can produce O2+ or O- ions, and a microbeam source for Cs+ ions, providing premium beam stability and ultra-fine minimum beam size (300nm for O2+ and 200nm for Cs+). Key capabilities of the IMS-6f include low detection limits and high resolving power in depth profiling, ultra-shallow depth profiling, 3D ion imaging, and excellent charge neutralization, making it an advanced tool for studying material surfaces and interfaces at the nanoscale.文件
无文件
CAMECA
IMS-6f
类别
Spectrometer / SIMS
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
117154
晶圆尺寸：
未知
年份：
未知
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说明
无说明配置
无配置OEM 型号描述
The CAMECA IMS-6f is an ultra-high vacuum (UHV) system designed for secondary ion mass spectrometry (SIMS) analysis. Equipped with a magnetic sector analyzer, it offers exceptional mass resolving power, with a minimum m/Dm of 25000 (10% definition). The system features a duoplasmatron source that can produce O2+ or O- ions, and a microbeam source for Cs+ ions, providing premium beam stability and ultra-fine minimum beam size (300nm for O2+ and 200nm for Cs+). Key capabilities of the IMS-6f include low detection limits and high resolving power in depth profiling, ultra-shallow depth profiling, 3D ion imaging, and excellent charge neutralization, making it an advanced tool for studying material surfaces and interfaces at the nanoscale.文件
无文件