说明
Model: PEA983_M10 Software Version 586 CIM SECS,GEM Process Batch process Missing/Faulty Parts / Accessories List Description: NONE General: Main tool, Booster Pump, Diw heater Canister Console, UPS, Transformer, Parts配置
Hardware Configuration (Fab) System Type Description Quantity Status Handler System : NA Options System : Hardware Configuration (Subfab / Auxilliary Units) Description: NoneOEM 型号描述
The MERCURY® MP Surface Conditioning System is a wet-chemical batch processing tool for wafers up to 200 mm in diameter. It offers reliable and repeatable processing for a variety of applications, with the flexibility and control to ensure superior performance and high yields. The system can be fully automated with the addition of an optional material handling system. The MERCURY MP system uses FSI centrifugal spray technology, which provides several advantages, including reduced chemical, DI water, and disposal costs, as well as a smaller footprint than typical wet processing systems. Etching applications that can be performed in the MERCURY system include patterned aluminum etch/strip, wafer reclaim, oxide etch/strip, and polysilicon deglaze.文件
类别
Spray Solvent / Acid
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123819
晶圆尺寸：
8"/200mm
年份：
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / FSI
MERCURY MP
类别
Spray Solvent / Acid
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123819
晶圆尺寸：
8"/200mm
年份：
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available