说明
i-Line Stepper配置
无配置OEM 型号描述
The PAS 5500/200B is the first stepper to incorporate ASML's revolutionary AERIALTM illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical mass production of next-generation devices. The i-line stepper combines 0.35 micron resolution with industry-leading overlay performance of 50nm, or 100nm in machine-to-machine matching.文件
无文件
类别
Steppers & Scanners
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147496
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
PAS 5500 / 200B
类别
Steppers & Scanners
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147496
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
i-Line Stepper配置
无配置OEM 型号描述
The PAS 5500/200B is the first stepper to incorporate ASML's revolutionary AERIALTM illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical mass production of next-generation devices. The i-line stepper combines 0.35 micron resolution with industry-leading overlay performance of 50nm, or 100nm in machine-to-machine matching.文件
无文件