说明
Exposure Tool Width 82.677 in (210.0 cm) Depth 179.528 in (456.0 cm) Height 88.189 in (224.0 cm) Weight 18,408 lb (8,350 kg)配置
Excimer Laser type: CYMER XLA165OEM 型号描述
Twinscan AT:1200B provides resolutions up to 80-nm and is designed for 300-mm wafers. Like all other Twinscan tools, AT:1200B can process two wafers simultaneously.文件
无文件
类别
Steppers & Scanners
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
150850
晶圆尺寸：
8"/200mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
TWINSCAN AT:1200B
类别
Steppers & Scanners
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
150850
晶圆尺寸：
8"/200mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Exposure Tool Width 82.677 in (210.0 cm) Depth 179.528 in (456.0 cm) Height 88.189 in (224.0 cm) Weight 18,408 lb (8,350 kg)配置
Excimer Laser type: CYMER XLA165OEM 型号描述
Twinscan AT:1200B provides resolutions up to 80-nm and is designed for 300-mm wafers. Like all other Twinscan tools, AT:1200B can process two wafers simultaneously.文件
无文件