说明
Asset Description - 365nm I-line Software Version - 4.1 CIM - secs Process - 65/130nm配置
Handler System: Wfr handler (OK) Factory Interface: FOUP 1 (OK) Main System: Body 1 (OK)OEM 型号描述
The productivity enhancements in TWINSCAN C increase wafer output to over 110 wafers per hour for 300 mm wafers at real production conditions (109 exposures per wafer). The TWINSCAN C product family will be available on four systems: the AT:400C, AT:750C, AT:850C and AT:1150C.文件
无文件
类别
Steppers & Scanners
上次验证： 14 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Down
产品编号：
133490
晶圆尺寸：
12"/300mm
年份：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
TWINSCAN AT:400C
类别
Steppers & Scanners
上次验证： 14 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Down
产品编号：
133490
晶圆尺寸：
12"/300mm
年份：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Asset Description - 365nm I-line Software Version - 4.1 CIM - secs Process - 65/130nm配置
Handler System: Wfr handler (OK) Factory Interface: FOUP 1 (OK) Main System: Body 1 (OK)OEM 型号描述
The productivity enhancements in TWINSCAN C increase wafer output to over 110 wafers per hour for 300 mm wafers at real production conditions (109 exposures per wafer). The TWINSCAN C product family will be available on four systems: the AT:400C, AT:750C, AT:850C and AT:1150C.文件
无文件