说明
ASML XT 1900Gi 300mm litho tool Details Attached配置
Software Version: 5.0 CIM: SECS, GEM Process: Immersion Lithography Factory Interface: SMIF Options System: - Agile - 300mm FOUP - Version 5.0 Immersion Hood - ART OHT interface - SMASH Alignment - Baseliner Focus - Cymer XLA 360 Laser - Reticle Library - Aux Exhaust UnitOEM 型号描述
The TWINSCAN XT:1900Gi Step-and-Scan system is a high-productivity, dual-stage immersion lithography tool designed for volume 300-mm wafer production at 45-nm resolution and below.文件
类别
Steppers & Scanners
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
140508
晶圆尺寸：
未知
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASML
TWINSCAN XT:1900Gi
类别
Steppers & Scanners
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
140508
晶圆尺寸：
未知
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available