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CANON FPA-3000i4
    说明
    无说明
    配置
    无配置
    OEM 型号描述
    The Canon FPA-3000 i4 is a stepper used in the semiconductor industry. It has a reticle size of 6" square with a thickness of 0.25" and is made of quartz material1. It can handle wafer sizes of 4" through 8" that are SEMI Standard, JEIDA, Notch/Flat. The Canon FPA-3000 i4 has a projection magnification of 1/5 X and a numerical aperture of .45 - .63. The field size is 22x22 17x26 and the exposure light is Kr F (365nm). The estimated throughput of the Canon FPA-3000 i4 is 59 wafers per hour for an 8" wafer with 60 shots and 22 mm field size. For a 6" wafer, it can handle up to 83 wafers per hour with 32 shots and 22 mm field size. The Canon FPA-3000 i4 has an alignment accuracy of less than 0.06 μm (mean + 3 σ). The Canon FPA-3000 i4 has a resolution of 0.35 μm.
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    CANON

    FPA-3000i4

    verified-listing-icon

    已验证

    类别
    Steppers & Scanners

    上次验证: 今天

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    111317


    晶圆尺寸:

    未知


    年份:

    1995


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    类似上架物品
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    CANON FPA-3000i4

    CANON

    FPA-3000i4

    Steppers & Scanners
    年份: 1995状况: 二手
    上次验证今天

    CANON

    FPA-3000i4

    verified-listing-icon
    已验证
    类别
    Steppers & Scanners
    上次验证: 今天
    listing-photo-3de30d9d039d42ddadf5534fa9d59f27-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    111317


    晶圆尺寸:

    未知


    年份:

    1995


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    无说明
    配置
    无配置
    OEM 型号描述
    The Canon FPA-3000 i4 is a stepper used in the semiconductor industry. It has a reticle size of 6" square with a thickness of 0.25" and is made of quartz material1. It can handle wafer sizes of 4" through 8" that are SEMI Standard, JEIDA, Notch/Flat. The Canon FPA-3000 i4 has a projection magnification of 1/5 X and a numerical aperture of .45 - .63. The field size is 22x22 17x26 and the exposure light is Kr F (365nm). The estimated throughput of the Canon FPA-3000 i4 is 59 wafers per hour for an 8" wafer with 60 shots and 22 mm field size. For a 6" wafer, it can handle up to 83 wafers per hour with 32 shots and 22 mm field size. The Canon FPA-3000 i4 has an alignment accuracy of less than 0.06 μm (mean + 3 σ). The Canon FPA-3000 i4 has a resolution of 0.35 μm.
    文件

    无文件

    类似上架物品
    查看全部
    CANON FPA-3000i4

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    Steppers & Scanners年份: 1998状况: 翻新上次验证:30 多天前
    CANON FPA-3000i4

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    FPA-3000i4

    Steppers & Scanners年份: 1996状况: 二手上次验证:今天