说明
i-Line Stepper配置
无配置OEM 型号描述
The FPA-3000i5+ is a high productivity mix-and-match partner with Canon excimer series scanners and steppers. Wide-field lens with extra NA variability supports a variety of fine patterning processes. This highly proven and successful veteran of the Canon stepper line-up has been a best-selling product since its release in 1996. Features: -Supports varieties of fine pattern demands. High resolution, wide-field lens, extra NA variability, plus reticle options. -High alignment accuracy for CMP processes. Two off-axis methods in addition to Canon's original technology文件
无文件
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
121121
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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CANON
FPA-3000i5+
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
121121
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
i-Line Stepper配置
无配置OEM 型号描述
The FPA-3000i5+ is a high productivity mix-and-match partner with Canon excimer series scanners and steppers. Wide-field lens with extra NA variability supports a variety of fine patterning processes. This highly proven and successful veteran of the Canon stepper line-up has been a best-selling product since its release in 1996. Features: -Supports varieties of fine pattern demands. High resolution, wide-field lens, extra NA variability, plus reticle options. -High alignment accuracy for CMP processes. Two off-axis methods in addition to Canon's original technology文件
无文件