说明
Details Attached配置
Power: 200V 50/60Hz 3 Phase ●Max Sigma: 0.85 ●Conventional (Lens NA): 0.73 ●Annular: Ratio 0.3/0.6; 0.58/0.9; 0.53/0.75 ●Resolution (nm) for ⅔ annular: 130 ●Total Focus Deviation (nm): 150 ●Stepping (nm): 17 ●Distortion (nm): 20 ●CD Variation (nm): 16 ●Illumination Uniformity (%): <=1.2% ●Dose Control (%)*: 1.5%OEM 型号描述
The FPA-5000ES3 is a KrF scanner with a 0.73 NA, designed for 130nm production. It is built on the Canon FPA-5000 scanning platform and incorporates experience from previous models. The ES3 has significant refinements, particularly in lens performance, and employs unique lens elements using Canon’s “wavefront engineering” method. Lens testing results show values much smaller than the manufacturing target, in some cases by as much as 30-40%.文件
类别
Steppers & Scanners
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147198
晶圆尺寸：
12"/300mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
FPA-5000ES3
类别
Steppers & Scanners
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147198
晶圆尺寸：
12"/300mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available