说明
90nm KrF Scanner配置
Uniformity(1.811%), Intensity(24299.68W/m2), 6" Reticle Inline((R->L), Cymer Laser(ELS-7310). Fab out (Jan. 2019)OEM 型号描述
KrF photolithography system supports high-volume manufacturing of semiconductor devices. The ES6a scanning stepper utilizes Canon’s Advanced Flexible Illumination System (AFIS) to resolve 90 nanometer features.文件
无文件
CANON
FPA-6000ES6a
已验证
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
95106
晶圆尺寸：
12"/300mm
年份：
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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CANON
FPA-6000ES6a
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
95106
晶圆尺寸：
12"/300mm
年份：
2007
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
90nm KrF Scanner配置
Uniformity(1.811%), Intensity(24299.68W/m2), 6" Reticle Inline((R->L), Cymer Laser(ELS-7310). Fab out (Jan. 2019)OEM 型号描述
KrF photolithography system supports high-volume manufacturing of semiconductor devices. The ES6a scanning stepper utilizes Canon’s Advanced Flexible Illumination System (AFIS) to resolve 90 nanometer features.文件
无文件